====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     2.E+04 A   Layer # 1- Density = 4.817E22 atoms/cm3 = 19.04 g/cm3
  Layer # 1-  U = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1001.00
 Ion Average Range =   106.4E+02 A   Straggling =   332.2E+01 A
 Ion Lateral Range =   346.4E+01 A   Straggling =   425.1E+01 A
 Ion Radial  Range =   540.4E+01 A   Straggling =   261.7E+01 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =19
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = -000.3902  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 002.7054  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe          U    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
200010.E-03  0.0000E+00  3.7809E+07
400010.E-03  0.0000E+00  5.3225E+07
600010.E-03  9.9900E+02  4.4166E+07
800010.E-03  0.0000E+00  4.8514E+07
100001.E-02  0.0000E+00  4.6852E+07
120001.E-02  0.0000E+00  3.4052E+07
140001.E-02  4.9950E+02  4.0400E+07
160001.E-02  9.9900E+02  4.5673E+07
180001.E-02  0.0000E+00  5.4400E+07
200001.E-02  2.9970E+03  5.7375E+07
220001.E-02  4.9950E+02  5.5243E+07
240001.E-02  9.9900E+02  5.4193E+07
260001.E-02  4.9950E+02  6.4751E+07
280001.E-02  4.9950E+02  6.6657E+07
300001.E-02  1.9980E+03  6.8788E+07
320001.E-02  1.9980E+03  6.5002E+07
340001.E-02  9.9900E+02  6.6267E+07
360001.E-02  1.4985E+03  6.2933E+07
380001.E-02  9.9900E+02  6.1827E+07
400001.E-02  1.9980E+03  7.2767E+07
420001.E-02  9.9900E+02  8.5334E+07
440001.E-02  1.4985E+03  7.5084E+07
460001.E-02  2.9970E+03  8.3687E+07
480001.E-02  1.9980E+03  7.8070E+07
500001.E-02  3.4965E+03  8.9315E+07
520001.E-02  4.9950E+03  8.2160E+07
540001.E-02  2.4975E+03  9.2656E+07
560001.E-02  4.4955E+03  1.0171E+08
580001.E-02  4.9950E+03  9.7685E+07
600001.E-02  3.4965E+03  1.0332E+08
620001.E-02  3.9960E+03  1.0329E+08
640001.E-02  5.4945E+03  1.0879E+08
660001.E-02  3.9960E+03  1.0033E+08
680001.E-02  5.4945E+03  1.0164E+08
700001.E-02  4.4955E+03  1.2262E+08
720001.E-02  7.4925E+03  1.2133E+08
740001.E-02  4.4955E+03  1.2507E+08
760001.E-02  1.0490E+04  1.3505E+08
780001.E-02  6.9930E+03  1.2691E+08
800001.E-02  8.4915E+03  1.1622E+08
820001.E-02  7.9920E+03  1.1638E+08
840001.E-02  6.4935E+03  1.1673E+08
860001.E-02  5.4945E+03  1.2118E+08
880001.E-02  6.9930E+03  1.2457E+08
900001.E-02  6.9930E+03  1.3785E+08
920001.E-02  9.4905E+03  1.3315E+08
940001.E-02  8.9910E+03  1.3790E+08
960001.E-02  1.0490E+04  1.2683E+08
980001.E-02  6.4935E+03  1.3869E+08
100000.E-01  1.4486E+04  1.4392E+08
102000.E-01  1.0490E+04  1.3156E+08
104000.E-01  1.0490E+04  1.2059E+08
106000.E-01  1.5485E+04  1.2438E+08
108000.E-01  9.9900E+03  1.2212E+08
110000.E-01  9.4905E+03  1.1649E+08
112000.E-01  1.0989E+04  1.0778E+08
114000.E-01  1.1489E+04  1.0591E+08
116000.E-01  8.4915E+03  1.1222E+08
118000.E-01  1.3986E+04  1.0239E+08
120000.E-01  9.4905E+03  9.5182E+07
122000.E-01  1.3986E+04  1.0423E+08
124000.E-01  8.4915E+03  9.4014E+07
126000.E-01  1.1988E+04  8.8381E+07
128000.E-01  1.4985E+04  9.7117E+07
130000.E-01  8.4915E+03  7.2635E+07
132000.E-01  9.9900E+03  7.3958E+07
134000.E-01  1.1489E+04  6.2613E+07
136000.E-01  1.0490E+04  5.9474E+07
138000.E-01  5.9940E+03  5.5295E+07
140000.E-01  6.9930E+03  4.9256E+07
142000.E-01  1.0490E+04  4.8499E+07
144000.E-01  8.9910E+03  4.1535E+07
146000.E-01  8.4915E+03  4.1262E+07
148000.E-01  8.9910E+03  3.5628E+07
150000.E-01  6.9930E+03  3.0373E+07
152000.E-01  5.4945E+03  2.3363E+07
154000.E-01  6.9930E+03  2.2637E+07
156000.E-01  3.9960E+03  1.8881E+07
158000.E-01  2.4975E+03  1.4102E+07
160000.E-01  3.9960E+03  1.4126E+07
162000.E-01  3.9960E+03  8.6860E+06
164000.E-01  2.4975E+03  5.6776E+06
166000.E-01  1.9980E+03  6.6332E+06
168000.E-01  1.9980E+03  5.2395E+06
170000.E-01  0.0000E+00  3.6447E+06
172000.E-01  3.4965E+03  5.7655E+06
174000.E-01  4.9950E+02  2.5583E+06
176000.E-01  9.9900E+02  1.1763E+06
178000.E-01  4.9950E+02  6.8732E+05
180000.E-01  4.9950E+02  3.8662E+05
182000.E-01  0.0000E+00  1.7682E+05
184000.E-01  0.0000E+00  0.0000E+00
186000.E-01  0.0000E+00  0.0000E+00
188000.E-01  0.0000E+00  0.0000E+00
190000.E-01  0.0000E+00  0.0000E+00
192000.E-01  0.0000E+00  0.0000E+00
194000.E-01  0.0000E+00  0.0000E+00
196000.E-01  0.0000E+00  0.0000E+00
198000.E-01  0.0000E+00  0.0000E+00
200000.E-01  0.0000E+00  0.0000E+00
